High-energy resolution μ-XRF analysis by position sensitive spectrometer

With a high-energy resolution micro-X-ray fluorescence (μ-XRF) analysis setup, which basically consists of an X-ray microbeam formed by an X-ray focusing lens combined with an X-ray apparatus and a wavelength dispersive position sensitive spectrometer with a flat crystal (PSS), preliminary results have been obtained. The counting rate of the analyzed element linearly increased with the power of X-ray apparatus, and the energy resolution, full width of half maximum (FWHM) of Ka lines of Ti and Cr reached 16.6 and 23.6 eV, respectively. The Cr Kb and Mn Ka lines in a sample of stainless steel could clearly be resolved. The above-mentioned results are also compared with those obtained by synchrotron radiation light microbeam combined with the PSS. The facts show that the high-energy resolution element analysis is feasible by using the setup. Moreover, problems for the setup and the ways to resolve them are discussed as well.