Internal Defect Measurement of Scattering Media by Optical Coherence Microscopy Internal Defect Measurement of Scattering Media by Optical Coherence Microscopy

Internal Defect Measurement of Scattering Media by Optical Coherence Microscopy

  • 期刊名字:半导体光子学与技术
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  • 论文作者:ZHU Yong-kai,ZHAO Hong,WANG Zh
  • 作者单位:Institute of Laser and Infrared Application,Insititute of Modern Physics
  • 更新时间:2022-11-24
  • 下载次数:
论文简介

Optical coherence microscopy is applied to measure scattering media's internal defect, which based on low coherence interferometry and confocal microscopy. Optical coherence microscopy is more effective in the rejection of out of focus and multiple scattered photons originating further away of the focal plane. With the three-dimension scanning, the internal defect is detected by measuring the thickness of different points on the sample. The axial resolution is 6 μm and lateral resolution is 1.2 μm. This method is possessed of the advantages over the other measurement method of scattering media, such as non-destruction and highresolution.

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