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Effect of Substrate Bias on Microstructure and Properties of Tetrahedral Amorphous Carbon Films Effect of Substrate Bias on Microstructure and Properties of Tetrahedral Amorphous Carbon Films

Effect of Substrate Bias on Microstructure and Properties of Tetrahedral Amorphous Carbon Films

  • 期刊名字：材料科学技术学报
  • 文件大小：
  • 论文作者：Jiaqi ZHU，Jiecai HAN，Songhe ME
  • 作者单位：Center of Composite Materials
  • 更新时间：2022-11-22
  • 下载次数：次
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论文简介

The microstructure and properties of tetrahedral amorphous carbon (ta-C) films deposited by the filtered cathodic vacuum arc technology has been investigated by visible Raman spectroscopy, AFM and Nano-indentor. The Raman spectra have been fitted with a s

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