Similarity theory based method for MEMS dynamics analysis

A new method for MEMS dynamics analysis is presented, ased on the similarity theory. With this method, two systems' similarities can be captured in terms of physics quantities/governed-equations amongst different energy fields, and then the unknown dynamic characteristics of one of the systems can be analyzed ac-cording to the similar ones of the other system. The probability to establish a pair of similar systems among MEMS and other energy systems is also discussed based on the equivalent between mechanics and electrics, and then the feasibility of applying this method is proven by an example, in which the squeezed damping force in MEMS and the current of its equivalent circuit established by this method are compared.