GB/T 40279-2021硅片表面薄膜厚度的测试 光学反射法Test method for thickness of films on silicon wafer surface. Optical reflection method GB/T 40279-2021硅片表面薄膜厚度的测试 光学反射法Test method for thickness of films on silicon wafer surface. Optical reflection method

GB/T 40279-2021硅片表面薄膜厚度的测试 光学反射法Test method for thickness of films on silicon wafer surface. Optical reflection method

  • 标准类别:[GB] 国家标准
  • 标准大小:
  • 标准编号:GB/T 40279-2021
  • 标准状态:
  • 更新时间:2022-03-18
  • 下载次数:
标准简介

GB/T 40279-2021硅片表面薄膜厚度的测试 光学反射法Test method for thickness of films on silicon wafer surface. Optical reflection method

标准截图