A Brief Overview of Research on Chemical Molecular Contamination in Cleanrooms

This review proposes associated standards from abroad regarding chemical contamination of the air, and has analyzed the formation of chemical air pollution, the common contaminants and the testing methods of projects. This paper demonstrates the capability of China to begin commercial testing of chemical contamination of the air.In addition, it offers technological references of the feasibility for adopting the intemational standard ISO14644-8:2006.