IEC 63011-2-2018 集成电路--三维集成电路--第2部分:具有细间距互连的堆叠模具的对准 Integrated circuits – Three dimensional integrated circuits – Part 2: Alignment of stacked dies having fine pitch interconnect

This part of IEC 63011 provides specifications of initial alignment and alignment maintenance between multiple stacked integrated circuits during the die bonding process. These specifications define the alignment keys and operating procedures of the keys. These specifications apply only if electrical coupling method of die-to-die alignment is used in the die stacking.dition 1.0 2018-11 INTERNATIONAL STANDARD NORME INTERNATIONALE colour inside Integrated circuits – Three dimensional integrated circuits – Part 2: Alignment of stacked dies having fine pitch interconnect Circuits intégrés – Circuits intégrés tridimensionnels – Partie 2: Alignement de puces empilées à petits pas d'interconnexion IEC 63011-2:2018-11(en-fr) THIS PUBLICATION IS COPYRIGHT PROTECTED Copyright ？ 标准截图