IEC 62047-30-2017 半导体器件--微机电装置--第30部分:微机电系统压电薄膜的机电转换性能的测量方法 Semiconductor devices – Micro-electromechanical devices – Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

This part of IEC 62047 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process.dition 1.0 2017-09 INTERNATIONAL STANDARD colour inside Semiconductor devices – Micro-electromechanical devices – Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film IEC 62047-30:2017-09(en) THIS PUBLICATION IS COPYRIGHT PROTECTED Copyright ？ 2017 IEC, Geneva, Switzerland All rights reserved. Unless otherwise specified, no part of this publi